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Outer Diameter Φ300~Φ475 mm
Inner Diameter Customer Spec
Orientation (100), (111)
Type/Dopant P/Boron
Resistivity (ohmcm) Low Res(e.g<0.015,<0.02 …);Normal(e.g1-4); High Res(e.g60~90);Others
Thickness Customer Spec ± 0.05 mm
Others Customer Spec
Parameters
Outer Diameter
Φ300~Φ475 mm
Inner Diameter
Customer Spec
Orientation
(100), (111)
Type/Dopant
P/Boron
Resistivity (ohmcm)
Low Res(e.g<0.015,<0.02 …);Normal(e.g1-4); High Res(e.g60~90);Others
Thickness
Customer Spec ± 0.05 mm
Others
Customer Spec
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