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Wafer Category Test/Control/Dummy Wafer
Orientation (100)
Type / Dopant P/Born
Thickness 725±25μm
Resistivity >1Ω・cm or Customized
TTV <5μm
Warp <50μm
Bow <50μm
Parameters
Wafer Category
Test/Control/Dummy Wafer
Orientation
(100)
Type / Dopant
P/Born
Thickness
725±25μm
Resistivity
>1Ω・cm or Customized
TTV
<5μm
Warp
<50μm
Bow
<50μm
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